碳化硅單晶缺陷研究及產(chǎn)業(yè)化進展Research and Industrialization Progress of SiC Single Crystal Defects陳秀芳山東大學教授、南砂晶圓董事CHEN XiufangProfessor of Shandong University, Board Director of Guangzhou Summit Crystal Semiconductor Co.,Ltd
報告簡介:基于深層瞬態(tài)光譜學的Al/Ti 4H-SiC肖特基結(jié)構(gòu)缺陷研究 Investigation of Defect Levels of Al/Ti 4H-SiC Schottky Structures byDeep Level Transient Spectroscopy何亞偉 中國科學院半導體研究所 HE Yawei Institute of Semiconductors, Chinese Academy of Sciences